适应性模糊模态匹配电容微加工陀螺式静电控制
Li Cheng1, Ruimin Liu2, Shumin Guo3
1Department of Aeronautical and Aviation Engineering, Hong Kong Polytechnic University, Hong Kong.
Sensors (Basel, Switzerland)
|September 9, 2023
概括
一个模糊的PI控制器实现了微陀螺的模态匹配,提高了检测精度和稳定性. 这种控制技术优化了参数,以提高驾驶和检测模型的性能.
科学领域:
- 控制系统工程 控制系统工程
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- 模态匹配对于微型陀螺仪的性能至关重要.
- 传统的控制方法在优化微型陀螺仪的参数方面面临着挑战.
研究的目的:
- 为了利用模糊的PI控制器在微陀螺驾驶和检测模型中进行模态匹配.
- 通过模拟研究静电解控制技术.
主要方法:
- 开发了用于静电解控制的模拟模型.
- 实现了一个模糊的PI控制器来实现模式匹配.
- 优化的比例系数和积分系数.
主要成果:
- 实现了模态匹配,频率差小于1Hz.
- 输入直流偏移被减少到<0.6V.
- 发现了最佳的模糊PI参数:比例系1.5,积分系数20.
结论:
- 模糊的PI控制有效地实现了微型陀螺的模式匹配.
- 这种方法增强了参数优化,以提高检测准确性和稳定性.
- 静电解控制显示微回旋应用的希望.
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