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Updated: Jul 1, 2026

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低功率AlGaN/GaN三角微型杆用于空气流检测.

Balaadithya Uppalapati1, Durga Gajula2, Manav Bava3

  • 1Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USA.

Sensors (Basel, Switzerland)
|September 9, 2023
PubMed
概括

这项研究介绍了一种新的AlGaN/GaN微型杆空气流传感器. 它提供高分辨率检测与低功耗,使其适合各种传感应用.

关键词:
它们是AlGaN/GaNN.在MEMS MEMS中使用.检测空气流的探测器微型杆加热器的使用方法这是一个二维的电子气体.

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