XY

Yunzhuang Chen1, Leijie Lai1, Limin Zhu2

  • 1School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China.

PubMed
概括

一个新的微定位仪提供了大范围和高精度定位. 这种粗细的平行双动曲微定位器 (CFPDFM) 实现了低干扰的40nm分辨率,非常适合复杂的平面任务.