一种具有低干扰行为的粗细平行双启动XY曲微定位器的结构设计和实验评估
Yunzhuang Chen1, Leijie Lai1, Limin Zhu2
1School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China.
The Review of scientific instruments
|September 12, 2023
概括
一个新的微定位仪提供了大范围和高精度定位. 这种粗细的平行双动曲微定位器 (CFPDFM) 实现了低干扰的40nm分辨率,非常适合复杂的平面任务.
科学领域:
- 机械工程 机械工程
- 纳米技术纳米技术
- 机器人技术 机器人技术 机器人技术
背景情况:
- 高精度定位系统对于先进的制造和科学研究至关重要.
- 现有的微定位器通常面临范围,精度或执行器干扰的限制.
研究的目的:
- 引入一种新的两度自由度 (2-DOF) 大范围粗细平行双动作曲微定位器 (CFPDFM).
- 分析和验证CFPDFM的性能特征,包括其运动范围,刚度和定位精度.
主要方法:
- 使用刚度矩阵方法开发用于运动范围,输入刚度和放大比率的分析模型.
- 通过有限元分析 (FEA) 和实验测试验证分析模型.
- 实施双伺服式合作驱动控制策略,用于增强闭环定位.
主要成果:
- 在CFPDFM实现一个大的平面运动范围3.02 × 3.11 mm2.2.
- 展示了≤40nm的高分辨率和粗细执行器之间的低干扰.
- 证实了优秀的横轴脱和平面复杂轨迹跟踪性能.
结论:
- 开发的CFPDFM为高精度,大范围平面定位提供了一个紧的解决方案.
- 它的低干扰和双启动设计允许在需要精确操纵的领域实现多功能应用.
- 该系统的性能验证了其适用于要求高的平面定位任务的适用性.
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