在自动化高分辨率扫描传输电子显微镜的先进技术
Alexander J Pattison1, Cassio C S Pedroso1, Bruce E Cohen1,2
1Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, 94720, United States of America.
Nanotechnology
|September 13, 2023
概括
扫描传输电子显微镜 (STEM) 现在可以实现高通量原子结构成像. 一个新型的管道系统与一个全-piezo阶段自动化数据采集,用于大规模的纳米粒子分析.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 显微镜的使用方法
背景情况:
- 扫描传输电子显微镜 (STEM) 对于原子级材料分析至关重要.
- 目前的STEM工作流程是劳动密集型的,并且仅限于小样本区域.
- 在STEM领域采集多模式数据提供了丰富,同时的信息道.
研究的目的:
- 开发一个灵活的,自动化系统,用于高通量原子分辨率的结构数据采集.
- 为了使纳米粒子的大规模成像使用STEM.
- 为了促进先进显微镜的多式数据采集.
主要方法:
- 实施基于管道的系统,用于自动化实验控制.
- 整合一个全零件样本阶段,以实现精确,高通量运动.
- 扫描传输电子显微镜用于原子分辨率成像的应用.
主要成果:
- 证明了原子分辨率结构数据的高通量获取.
- 成功地将该系统应用于纳米粒子的大规模成像.
- 实现了同时采集多式联运数据,增强了分析能力.
结论:
- 开发的管道系统显著提高了STEM效率和吞吐量.
- 纳米颗粒的自动化,大规模成像现在是可行的原子分辨率.
- 该系统推进了用于材料表征的多式联运数据采集.
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