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基于子波长网格的镜头集中误差测量与功率分析

Yu-Zhen Mao, Chin-Ting Ho, Shiau-Cheng Shiu

|September 14, 2023

概括

本研究介绍了一种精确的透镜定中心误差测量技术,使用次波长网格和功率分析. 与传统系统相比,这种新的方法将分辨率提高了四倍.

科学领域:

光学是什么?光学是什么?光学是什么?
计量学计量学计量学
纳米技术纳米技术

背景情况:

精确的镜头集中对于光学系统性能至关重要.
现有的集中误差测量系统在分辨率和灵敏度方面存在局限性.

研究的目的:

开发一种高度精确和灵敏的技术来测量镜头的中心偏差.
改进现有的光学集中误差测量系统.

主要方法:

一个模块利用一个亚波长格子图案的镜和一个反射集中系统.
对5mW和650nm的第1级衍射射线的分析.
使用功率计测量光轴误差测量,斯内尔定律和衍射特征.

主要成果:

与基于自结合的系统相比,实现了光学定位误差的分辨率,该误差被放大了4倍.
在测量镜头定位误差方面表现出高精度.
该技术利用功率分析进行精确的测量.

结论:

拟议的技术为镜头中心错误测量提供了更好的仪器灵敏度.
由于依赖光方向和能量变化,降低了传感器要求.
为光学元件对齐提供了更有效的方法.

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