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线性和非线性表征一个宽带集成的Si丰富的化赛道环共振器,用于芯片上的应用
Applied optics
|September 14, 2023
概括
我们描述了用于电信应用的富含的化 (SRSN) 赛道共振器. 该材料具有优异的热稳定性,在电信频段中没有非线性损失,因此适用于芯片上设备.
科学领域:
- 材料科学 材料科学 材料科学
- 光子学 是一个光子学.
- 纳米技术纳米技术
背景情况:
- 增强等离子体化学蒸汽沉积 (PECVD) 能够制造先进的光学材料.
- 化 (SiN) 平台对于集成光子学至关重要,因为它们的损失低和CMOS兼容性.
- 富的化 (SRSN) 为特定应用提供可调节的光学性能.
研究的目的:
- 进行PECVD培养的SRSN赛道环共振器的线性和非线性表征.
- 为了优化SRSN波导参数,在电信波长范围内实现平面分散.
- 为了评估SRSN微共振器的热光系数和热稳定性.
主要方法:
- 度法用于测量波导优化的折射率概况.
- 分析了取决于温度的传输光谱,以确定热光系数.
- 研究了取决于功率的传输光谱,以调查非线性效应和热稳定性.
主要成果:
- 优化了SRSN波导参数,以在电信频段中实现平面分散.
- 测量到的热光系数为3.2825×10−5 C−1.
- 在可见光和近红外光中观察到非线性损失,但在电信频段没有,这表明热稳定性很好.
结论:
- 对于电信应用,SRSN赛道共振器具有有利的线性和非线性光学特性.
- 该材料的优异热稳定性和电信频段中没有非线性损失是显著的优势.
- 基于SRSN的结构显示出在电信领域实现强大的芯片内线性和非线性光子设备的潜力.
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