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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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基于AlN的压电MEMS可变形镜子

Junning Zhang, Xinyue Zhang, Yan Wang

    Optics letters
    |September 14, 2023
    PubMed
    概括

    这项研究介绍了一种基于5毫米AlN的创新型压电微电子机械系统 (MEMS) 可变形镜 (DM) 与25个执行器. 它展示了CMOS兼容的制造和有效的光学偏差校正,展示了有前途的应用.

    科学领域:

    • 材料科学 材料科学 材料科学
    • 光电学是指光电子产品.
    • 微电子机械系统 (MEMS) 是一种微电子机械系统.

    背景情况:

    • 可变形镜 (DM) 在各种应用中对光学偏差校正至关重要.
    • 压电材料为MEMS设备的制造和执行提供了优势.
    • 化 (AlN) 是先进的MEMS设备的一个有前途的压电材料.

    研究的目的:

    • 介绍一个基于AlN的压电MEMS连续膜可变形镜的第一个原型.
    • 评估开发的DM的制造兼容性,执行特性和光学性能.
    • 展示AlN压电技术在高性能可变形镜中的潜力.

    主要方法:

    • 制造一个5mm有效孔径的基于AlN的压电MEMS DM,配有25个独立控制的执行器.
    • 执行属性的表征,包括线性,歇斯底里和叠加.
    • 使用表面轮适应Zernike多项式到第14阶的光学偏差校正验证.

    主要成果:

    • 成功演示了CMOS兼容的制造工艺,用于AlN压电DM.
    • 实现了双向线性调动,而歇斯底里则可以忽略不计.
    • 验证了执行器的优异的线性叠加控制能力.

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  • 证明了良好的光学偏差校正性能,校正高达第14阶的泽尼克多项式.

    • 结论:

    • 基于AlN的压电MEMS DM原型显示了光学应用的有吸引力的特性.
    • 尽管设备结构未经优化,但该技术显示出对偏差校正的巨大潜力.
    • 这项工作为使用AlN压电MEMS技术的先进自适应光学系统铺平了道路.