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Updated: Jul 16, 2025

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使用纳米钻石与空隙中心成像极端紫外线辐射

Teng-I Yang1, Yuen Yung Hui1, Jen-Iu Lo2

  • 1Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei City 106319, Taiwan.

Nano letters
|September 14, 2023
PubMed
概括

具有空 (NV) 中心的光纳米钻石 (FND) 作为闪光灯用于成像极紫外线 (EUV) 辐射. 这种新的方法可以准确地描述用于纳米电子芯片制造的EUV光束.

关键词:
在波段间隙上方的激发激发.极端紫外线辐射 极端紫外线辐射光纳米钻石是一种光纳米钻石.摄影光刻法 (photolithography) 是一种光刻法.闪器的闪器是什么意思同步子辐射是同步子辐射.

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