合成分子光谱建模用于确定低压等离子体的旋转,振动和激发温度
Jonggu Han1, Woojin Park1, Jongsik Kim2
1Department of Applied Plasma and Quantum Beam Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju-si, Jeollabuk-do 54896, Republic of Korea.
Spectrochimica acta. Part A, Molecular and biomolecular spectroscopy
|September 16, 2023
概括
这项研究使用先进的数值模拟来分析等离子体的热特性. 结果显示,旋转,振动和激发温度之间存在明显的关系,这对于工业应用至关重要.
科学领域:
- 等离子体物理学的物理学
- 频谱学是一种光谱学.
- 化学工程是化学工程的重要组成部分.
背景情况:
- 等离子体的高反应性在工业中很有价值.
- 控制等离子体特性需要了解热特性.
- 理想的反应物取决于精确的血控制.
研究的目的:
- 为了确定感应合等离子体的热特性.
- 为了研究旋转,振动和激发温度.
- 为了将这些温度与等离子体输入功率相关联.
主要方法:
- 使用合成光谱集群的高级数值模拟.
- 对三个分子带系统的分析:N2 B-A,N2 C-B和N2+ B-X.
- 在等离子体中测量温度 (5 mTorr,50 W - 900 W).
主要成果:
- 旋转和振动温度随着输入功率的增加而增加,显示了约250W的拐点.
- 激发温度下降到250W以下,在250W以上升高.
- 能量状态不处于热平衡;振动和激发温度相互相关.
结论:
- 该研究提供了控制等离子体的关键热数据.
- 观察到非平衡条件,突出显示了复杂的血动态.
- 讨论了解离,电离和激发温度之间的相关性.
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