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Updated: Aug 11, 2026

Chemical Vapor Deposition of an Organic Magnet, Vanadium Tetracyanoethylene
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低温原子层沉积的使用二六碳-1-heptyne作为前体

Mathias Franz1, Mahnaz Safian Jouzdani2, Lysann Kaßner1

  • 1Fraunhofer-Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany.

Beilstein journal of nanotechnology
|September 22, 2023
PubMed
概括

我们开发了一种低温原子层沉积 (ALD) 工艺,用于金属,使用一种新型前体和等离子体. 这种方法在晶圆层实现了统一的膜,这对于先进的电子应用至关重要.

关键词:
在 PEALD,你会发现.这是XPSXPS.原子层沉积 (ALD) 是指原子层的沉积.科巴尔特是什么意思 科巴尔特是什么意思低温ALD的使用方法血增强的ALD是一种血增强的ALD

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The probability of having two carbon-13 atoms next to each other is negligible because of the low natural abundance of carbon-13. Consequently, peak splitting due to carbon-carbon spin-spin coupling is not observed in spectra. However, protons up to three sigma bonds away split the carbon signal according to the n+1 rule, resulting in complicated spectra.
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