基于NbOx的灵活值切换装置的应力诱导降解和恢复
Jia Min Ang1,2, Putu Andhita Dananjaya1, Calvin Ching Ian Ang1
1School of Physical and Mathematical Sciences, Nanyang Technological Univcersity, 21 Nanyang Link, Singapore, 637371, Singapore.
Scientific reports
|September 25, 2023
概括
在柔性基板上的氧化 (NbOx) 选择器装置在应力下呈现降解,但在回火后恢复. 这证明了它们在具有耐用性和耐久性高的灵活电子产品中的潜力.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 纳米技术纳米技术
背景情况:
- 灵活的电子产品需要坚固的组件,能够承受机械应力.
- 基于氧化 (NbOx) 的设备对下一代电子应用具有前景.
- 了解应力下降解机制对于设备可靠性至关重要.
研究的目的:
- 研究NbOx选择器设备在循环应变下在柔性基板上的功能和故障机制.
- 通过降解后化来探索应力NbOx设备的回收潜力.
- 阐明控制机械应力和回火后切换行为的潜在物理机制.
主要方法:
- 在柔性基板上制造和测试NbOx选择器件.
- 循环拉伸和压缩应变的应用以诱导降解.
- 降解后回火过程,以评估设备回收.
- 使用普尔 - 弗伦克尔机制配件分析设备切换行为.
主要成果:
- 循环拉伸应变导致膜裂纹,原因是原子排列被破坏.
- 循环压缩应变导致曲脱层.
- 化后应变诱导的降解导致设备恢复,降低值和保持电压.
- 普尔 - 弗伦克尔配件提供了关于变压和回火后切换机制的见解.
- 设备在循环曲应变下表现出高耐久性 (10^5周期).
结论:
- NbOx选择器设备显示出灵活的电子应用的巨大潜力.
- 机械应变会导致NbOx薄膜的特定故障模式 (裂,分层).
- 化提供了一种有效的方法,可以在应变引起的退化后恢复设备的功能.
- 该研究提供了对机械应力和恢复途径下的NbOx设备行为的基本理解.
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