开发用于SEM和水溶液样本的直接观测的通用介电常量成像单元
Toshihiko Ogura1, Tomoko Okada1, Michio Hatano2
1Health and Medical Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Central 6, Higashi 1-1-1, Tsukuba, Ibaraki 305-8566, Japan.
概括
研究人员开发了一个新的扫描电子辅助介电显微镜 (SE-ADM) 单元用于标准电子显微镜. 这项创新允许在溶液中直接观察高空间分辨率的标本,克服了以前的限制.
科学领域:
- 材料科学 材料科学 材料科学
- 显微镜的使用方法
- 纳米技术纳米技术
背景情况:
- 电子显微镜需要真空,防止在现场观察溶液中的样品.
- 现有的扫描电子辅助介电显微镜 (SE-ADM) 系统是定制制的,缺乏与扫描电子显微镜 (SEM) 操作系统的集成.
研究的目的:
- 开发一个通用的介电常数成像单元,与商用SEM相兼容.
- 为了使SEM和SE-ADM同时成像以观察溶液中的标本.
主要方法:
- 开发了一个新的SE-ADM单元,可连接到标准的SEM阶段.
- 将SE-ADM介电信号输入集成到SEM的外部终端.
- 在样本持有器中使用了10nm化薄膜来提高分辨率.
主要成果:
- 实现了同时使用 SEM 和 SE-ADM 的成像功能.
- 在观测中显示了4.5nm的空间分辨率.
- 成功观察了培养细胞,PM2.5和溶液中的粘土样本.
结论:
- 开发的通用SE-ADM单元增强了SEM在现场基于解决方案的成像能力.
- 这一进步使得各种标本,包括生物和环境样本,在本地条件下进行详细分析.
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