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在FIB的TEM样本准备过程中,LIPON和LCO之间的接口的稳定性

Aram Rezikyan1, Cameron Tanner2, Brian Berland3

  • 1Characterization Sciences Department, Corning Research and Development Corporation, 21 Lynn Morse Dr, Painted Post, NY 14870, USA.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|September 25, 2023
PubMed
概括

薄膜微型电池中氧化 (LIPON) 和氧化 (LCO) 接口的无形接口是聚焦离子束 (FIB) 样本制备的工件,而不是电池操作的结果.

关键词:
这就是TEMEM.电池 电池 电池 电池 电池 电池梁梁是一个光束.科巴尔酸盐是一种酸盐.专注的专注的专注.接口 接口 接口 接口 接口离子 离子 离子和是的组成部分.氧化化的氧化化物含有的含量的人.

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