相关实验视频

Updated: Jul 15, 2025

Performing In Situ Closed-Cell Gas Reactions in the Transmission Electron Microscope

Performing In Situ Closed-Cell Gas Reactions in the Transmission Electron Microscope

Published on: July 24, 2021

为基于MEMS的实地 (S) TEM实验准备高质量的样本

Vesna Srot¹, Rainer Straubinger², Felicitas Predel¹

¹Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|September 25, 2023

概括

这项研究引入了一种新的聚焦离子束 (FIB) 方法,用于在微电机系统 (MEMS) 芯片上准备电子显微镜样本. 这种技术使得在扫描传输电子显微镜 (STEM) 内的无人工物现场电气和电热实验成为可能.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
电子显微镜电子显微镜

背景情况:

在电子显微镜的实验需要高质量,无工件的样本.
传统的聚焦离子束 (FIB) 样本准备可能耗时,可能会引入工件.
微电机系统 (MEMS) 芯片为集成的现场实验提供了一个平台.

研究的目的:

开发一种基于FIB的新方法,用于在MEMS芯片上准备标本.
为了使扫描传输电子显微镜 ((S) TEM) 在现场无工件的电气和电热实验.
评估准备的样品的质量和性能.

主要方法:

一种基于FIB的新型样品准备技术,使用替代几何来将叶片附着在MEMS芯片上.
提升后处理和薄化片以实现电子透明度.
高分辨率扫描传输电子显微镜 (STEM) 成像和分析技术用于质量评估.
电偏差实验用于评估现场准备样本的性能.

主要成果:

开发的FIB方法在MEMS芯片上产生了干净和无工件的板块.
准备好的片的质量与经典的FIB准备的样品相美.
在准备的样本上成功演示了现场电偏差实验.

结论:

这种基于FIB的新方法对于在MEMS芯片上准备高质量的标本,用于实地 (S) TEM实验是有效的.
这种方法促进了纳米级材料的先进电气和电热表征.
该技术为纳米尺度设备的综合分析和开发提供了一个有前途的途径.

关键词:

在现场的TEM.在FIB上,FIB就是FIB.在MEMS中,芯片是MEMS.电气偏差是一种偏差.样品的准备样品的准备

更多相关视频

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments

Published on: June 27, 2022

Studying Dynamic Processes of Nano-sized Objects in Liquid using Scanning Transmission Electron Microscopy

Studying Dynamic Processes of Nano-sized Objects in Liquid using Scanning Transmission Electron Microscopy

Published on: February 5, 2017

相关概念视频

Preparation of Samples for Electron Microscopy

Preparation of Samples for Electron Microscopy

To be visualized by an electron microscope, either transmission or scanning, biological samples need to be fixed (stabilized) so the electron beam does not destroy them and dried thoroughly (desiccated/dehydrated) so the vacuum does not affect them. Fixation needs to be done as quickly as possible because the sample properties will start changing as soon as it is removed from its natural environment. For example, in a tissue sample, the oxygen levels begin decreasing, causing an altered...