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Updated: Jul 15, 2025

Determining the Mechanical Strength of Ultra-Fine-Grained Metals
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Published on: November 22, 2021

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在微电子设备的金属导电层中确定应力,使用高分辨率电子反射散射衍射和有限元分析

Timothy Ruggles1, Scott Grutzik1, Kelly Stephens1

  • 1Sandia National Laboratories, 1515 Eubank SE, Albuquerque, NM 87123, USA.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|September 25, 2023
PubMed
概括

可以预测微电子器件因应力空化而延迟故障. 一种新方法使用高分辨率电子反射散射 (HREBSD) 测量的基板扭曲来确定金属层的内部应力.

关键词:
人权高专和欧洲人权事务委员会 (HREBSD) 提出了这一建议.微电子技术的微电子压力使得空气变得空白.

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