特殊环境对SiC MOSFETs的影响
Zhigang Li1, Jie Jiang2,3, Zhiyuan He3
1School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China.
Materials (Basel, Switzerland)
|September 28, 2023
概括
在碳化物金属氧化物半导体场效应晶体管 (SiC MOSFET) 在气和高温,高湿度环境中的研究揭示了性能变化. 气增加了SiC MOSFET的性能,而湿度降低了它的性能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 碳化物 (SiC) 金属氧化物半导体场效应晶体管 (MOSFET) 对于高功率应用至关重要.
- 了解设备在环境压力下的性能对于可靠性至关重要.
研究的目的:
- 研究气和高温/高湿度对SiC MOSFET性能的影响.
- 分析导致SiC MOSFET性能变化的潜在机制.
主要方法:
- 三种SiC MOSFET类型暴露于气 (500小时) 和高温/湿度条件下.
- 电气特性包括值电压,传导率和排水电流的测量.
- 对氧化物电荷和通道电子流动性的环境影响分析.
主要成果:
- 暴露在气中导致负值电压漂移,过导率增加和排水电流.
- 仅仅是高温并没有加剧的影响,但可能会降低电子的移动性.
- 高温和高湿度导致负值电压漂移,并由于接触腐蚀而降低了透导/排水电流.
结论:
- 气可以通过增加正定电荷和电子流动性来提高SiC MOSFET的性能.
- 长时间的高温可以通过压力SiO2/SiC接口来降解SiC MOSFET.
- 高湿度环境通过腐蚀对SiC MOSFET产生负面影响,降低了整体性能.
相关概念视频
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