垂直钻石p-n连接二极管与阶段边缘终结结构通过模拟设计
Guangshuo Cai1, Caoyuan Mu2, Jiaosheng Li1
1School of Optoelectronic Engineering, Guangdong Polytechnic Normal University, Guangzhou 510665, China.
Micromachines
|September 28, 2023
概括
模拟了具有步骤边缘终结的钻石垂直p-n连接二极管. 结合结点终端延伸,通过优化电场分布,显著改善了故障电压和设备性能.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 设备工程 设备工程
背景情况:
- 垂直p-n连接二极管是重要的半导体设备.
- 边缘终端对于二极管的高压性能至关重要.
- 钻石为动力电子提供了卓越的材料性能.
研究的目的:
- 为了研究以钻石为基础的垂直p-n连接二极管与步骤边缘终结.
- 为了提高这些二极管的故障电压和整体性能.
- 分析交叉点终端延伸对电场分布的影响.
主要方法:
- 使用Silvaco TCAD (版本5.0.10.R) 进行设备模拟.
- 研究的二极管具有传统的,一步边缘,并结合结点终端延伸.
- 优化了交叉点终端延伸的结构参数.
主要成果:
- 阶段边缘终结抑制了电场拥挤,但对前方特征的影响最小.
- 简单的步骤边缘终结导致了比理想的平行平面结构更低的故障电压.
- 结合结点终端延伸与步骤边缘终端实现了重叠的耗尽区域,均的电场和增强的故障电压.
结论:
- 阶段边缘终结在管理钻石二极管中的电场拥挤方面是有效的.
- 结合结点终端延伸与步骤边缘终端是一种可行的策略,可以显著提高故障电压.
- 优化的钻石垂直p-n连接二极管与先进的终端结构显示出高性能应用的希望.
相关概念视频
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