拼接测量和补偿超精确指导路的直度错误
Lian Zhou1, Nan Zheng1, Jie Li1
1Research Center of Laser Fusion, China Academy of Engineering Physics, Chengdu 610093, China.
Micromachines
|September 28, 2023
概括
这项研究引入了一种新的拼接测量方法,用于超精确的导轨直度错误. 该方法准确地测量和补偿错误,大大提高了超精密机器的加工精度.
科学领域:
- 计量学 计量学 计量学
- 机械工程 机械工程
- 光学工程是指光学工程.
背景情况:
- 超精密机器导线中的直度误差对于加工精度至关重要.
- 准确测量长距离导轨直度错误是一个挑战.
研究的目的:
- 提出和验证超精确导轨直度错误的拼接测量方法.
- 开发和测试一个直度错误补偿算法,以提高加工精度.
主要方法:
- 一种采用高精度平面镜和位移传感器的拼接测量技术.
- 一个基于坐标转换的数据拼接处理算法.
- 一个使用错误旋转转换和垂直轴位置校正的直度错误补偿算法.
主要成果:
- 对比实验显示,拼接和直接测量之间的最大差异为0.3微米,验证了该方法.
- 在1400毫米×500毫米平面光学上的研磨实验在补偿后将平度误差从7.54微米减少到2.98微米.
结论:
- 建议的拼接测量方法和数据处理算法是准确和可靠的.
- 直度错误补偿算法有效地抑制了导轨直度错误,提高了加工精度.
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