基于微共振器陀螺仪的刚度变化的电荷积累的研究
Mingze Gao1, Jiangkun Sun1, Sheng Yu1
1College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.
Micromachines
|September 28, 2023
概括
电容微电子机械系统 (MEMS) 设备中的电荷积累会降低性能. 这项研究引入了一种刚度变化方法,以准确地描述MEMS共振陀螺仪 (MSRGs) 中的电荷积累,揭示温度加速效应.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 电气工程 电气工程
背景情况:
- 容量微电子机械系统 (MEMS) 设备在介电层中面临长期充电问题.
- 这种电荷积累会对设备的可重复性和稳定性产生负面影响,特别是在高性能应用中.
- 准确的表征方法对于理解和减轻这些充电效应至关重要.
研究的目的:
- 分析电荷积累对微尺度共振陀螺仪 (MSRGs) 的影响.
- 提出和验证一种基于刚度变化的电荷积累的新型表征方法.
- 为了研究温度对电荷积累动态的影响.
主要方法:
- 对电荷积累对MSRG性能影响的分析.
- 开发一种利用硬度变化的表征技术.
- 在MSRGs中对电荷积累的实验研究,包括温度依赖.
主要成果:
- 在MSRGs中的电荷积累通过监测频率分裂和刚度的变化来准确地表征.
- 发现高温可以加速电荷积累过程.
- 在高温下观察到由于电荷积累而增加的额外电压.
结论:
- 拟议的硬度变化方法提供了电容MEMS设备中电荷积累的准确表征.
- 温度显著影响电荷积累的速度,更高的温度加快了这个过程.
- 了解和控制电荷积累对于提高MEMS设备的长期稳定性和可靠性至关重要.
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