基于二次对称杆放大功率的XY大型旅行微阶段的设计和分析
Tao Zhang1, Liuguang Xiong1, Zequan Pan1
1College of Electromechanical Engineering, Northeast Forestry University, Harbin 150006, China.
Micromachines
|September 28, 2023
概括
一个新的压电微定位平台使用对称的两级杆机制来提高精度. 这种创新的设计在微型运动中实现了高精度和稳定性,这对于先进的应用至关重要.
科学领域:
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
背景情况:
- 微定位平台对于精确任务至关重要.
- 压电驱动器提供高分辨率,但可能会遭受歇斯底里和寄生移位.
研究的目的:
- 设计,分析和测试由压电执行器驱动的新型微定位平台.
- 为了增强动态特性,并消除寄生体移位,使用对称双阶段杆 (STSL) 放大机制.
主要方法:
- 开发一个带有灵活链驱动,STSL放大和平行图输出结构的压电微定位平台.
- 弹性变形的分析建模,通过有限元模拟验证.
- 静态和动态性能的实验性评估,包括闭环控制以补偿歇斯底里.
主要成果:
- 实现了97.84μm × 98.03μm的运动范围.
- 输出合器位移误差低于1%,分辨率为8.1nm和8nm.
- 轨迹跟踪误差为0.6%的X轴和Y轴.
结论:
- 开发的压电微型执行器平台表现出卓越的动态性能,精度和稳定性.
- 该STSL机制有效地提高了性能,并最大限度地减少了寄生虫的迁移.
- 该平台显示了各种微定位应用的巨大潜力.
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