锁定光热方法用于在平面内测量热扩散率,使用悬浮SiNx膜上的阵列温度传感器
Felix Jiang1,2, Meguya Ryu2,3, Vivek Pachauri1
1Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 18-24, Aachen 52074, Germany.
The Review of scientific instruments
|September 29, 2023
概括
一个新的设备使用锁定光热方法测量化 (SiNx) 膜的平面内热扩散率. 结果显示,纳米级几何学与散装材料相比,显著降低了热扩散率.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 热物理 热物理
背景情况:
- 对纳米级材料来说,精确测量热性能至关重要.
- 化 (SiNx) 膜用于各种微电子和光子应用.
- 了解薄膜内平面热传输对于设备性能至关重要.
研究的目的:
- 开发一种用于测量SiNx膜的平面内热扩散率的装置.
- 研究周围环境 (空气/真空) 对热扩散的影响.
- 分析纳米尺度几何学对热传输特性的影响.
主要方法:
- 在SiNx膜上开发了一种具有直线或螺旋形状温度传感器阵列的设备.
- 锁定光热方法用于温度测量的应用.
- 使用四极方方法和1D翅膀近似分析2D热扩散.
主要成果:
- 该研究成功确定了SiNx膜的平面内热扩散率.
- 2D热扩散受环境热交换和空气平行导电的影响.
- 测量到的热扩散值明显低于散装SiNx,这是由于纳米尺度的限制效应造成的.
结论:
- 开发的光热方法是有效的测量热扩散在广泛的频率范围 (50-1000 Hz).
- 纳米尺度几何学显著影响SiNx膜中的热传输.
- 这些发现为用于设备应用的薄膜材料的热行为提供了宝贵的见解.
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