释放2D MoS的力量:在现场TEM研究其作为Ru互连中扩散障碍的潜力

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Ping-Hsuan Feng1, Kai-Yuan Hsiao1, Dun-Jie Jhan1

  • 1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.

ACS applied materials & interfaces
|October 4, 2023
PubMed
概括

二硫化物 (MoS2) 作为金属相互连接中的有效扩散屏障,防止扩散至800°C. 这种材料对先进的电子应用非常有前途.

关键词:
在MoS2的基础上,MoS2路由器互连连接扩散屏障是一种扩散屏障.在现场的TEM.治疗等离子体治疗

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