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用于高密度低接触低电阻共平面有机晶体管的光光学坚固电极

Da Xian¹, Xiaoli Zhao¹, Jiayi Liu¹

¹Center for Advanced Optoelectronic Functional Materials Research, and Key Lab of UV-Emitting Materials and Technology of Ministry of Education, Northeast Normal University, 5268 Renmin Street, Changchun, 130024, China.

|October 6, 2023

概括

研究人员开发了坚固的电极,以改善有机薄膜晶体管 (OTFT) 的光电法. 这一策略显著降低了接触电阻,提高了商业有机电子应用的现场效果性能.

科学领域:

有机电子学有机电子学
材料科学是一种材料科学.
设备物理设备物理

背景情况:

高性能有机薄膜晶体管 (OTFT) 对于有机电子技术的发展至关重要.
光成像共平面OTFT经常表现出充电注入不良和有限的场效应性能.
减少接触电阻是释放这些设备全部潜力的关键.

研究的目的:

开发一种简单有效的方法,用于制造光立体共平面OTFT的坚固电极.
使用新型电极制造策略,实现高密度,低接触电阻的共平面OTFT.
调查注入和访问阻力对设备性能的影响.

主要方法:

制造光刻硬质电极的坚固电极.
晶圆尺度制造共平面OTFT.
设备性能的电气特征,包括移动性和接触电阻.

主要成果:

成功制造了高密度共平面OTFT (28000厘米-2).
获得了优良的电气性能:可移动性高达2.01cm2V-1s-1.1.
证明接触电阻 (Rc) 显著降低至7.8kΩcm,性能优于Ag电极设备.

结论:

开发的坚固电极策略提供了一种可靠的方法来降低光立体共平面OTFT的接触电阻.
这种方法可以实现高密度集成,并改善有机电子产品的电性能.
了解注入和访问阻力对于优化共平面OTFT至关重要.

关键词:

共同平面的建筑架构.有机薄膜晶体管有机薄膜晶体管摄影光刻法 (photolithography) 是一种光刻法.坚固的电极是粗的电极.

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