原子层沉积作为元稳定半导体InN及其合金的启用者
Henrik Pedersen1, Chih-Wei Hsu1, Neeraj Nepal2
1Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden.
Crystal growth & design
|October 9, 2023
概括
原子层沉积 (ALD) 能够使化 (InN) 薄膜在低温下生长,克服了材料.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 纳米技术纳米技术
背景情况:
- 化 (InN) 是一种具有高电子流动性的半导体,非常适合用于红外光电子和高频晶体管.
- 由于InN的转移性和其低分解温度,使用传统的晶体生长方法阻碍了其发展.
研究的目的:
- 讨论使用原子层沉积 (ALD) 的 InN 薄膜和表轴层的生长.
- 突出ALD作为一种适合克服InN转移稳定的低温技术.
- 审查INN和相关三元合金的ALD的最新情况.
主要方法:
- 原子层沉积 (ALD) 对于InN和基于InN的三元合金 (例如,与GaN,AlN).
- 讨论ALD的自我限制的表面化学反应,以控制低温生长.
- 将ALD与其他现有的国内增长技术进行比较.
主要成果:
- ALD允许在低于通常所需的温度下 InN 薄膜和表皮层生长.
- ALD被认为是一种可行的技术,可以克服InN的热不稳定性.
- 审查了InN及其合金的ALD目前的进展.
结论:
- 原子层沉积被确定为实现基于InN的电子产品潜力的关键支持技术.
- ALD的低温处理对于克服InN转移稳定的局限性至关重要.
- 预计ALD的进一步发展将推动InN半导体应用的进展.
更多相关视频
相关概念视频
Metal-Semiconductor Junctions
363
The contact of metal and semiconductor can lead to the formation of a junction with either Schottky or Ohmic behavior.
Schottky Barriers
Schottky barriers arise when a metal with a work function (Φm) contacts a semiconductor with a different work function (Φs). Initially, electrons transfer until the Fermi levels of the metal and semiconductor align at equilibrium. For instance, if Φm > Φs, the semiconductor Fermi level is higher than the metal's before contact. The...
Schottky Barriers
Schottky barriers arise when a metal with a work function (Φm) contacts a semiconductor with a different work function (Φs). Initially, electrons transfer until the Fermi levels of the metal and semiconductor align at equilibrium. For instance, if Φm > Φs, the semiconductor Fermi level is higher than the metal's before contact. The...
363
Metallic Solids
18.5K
Metallic solids such as crystals of copper, aluminum, and iron are formed by metal atoms. The structure of metallic crystals is often described as a uniform distribution of atomic nuclei within a “sea” of delocalized electrons. The atoms within such a metallic solid are held together by a unique force known as metallic bonding that gives rise to many useful and varied bulk properties.
All metallic solids exhibit high thermal and electrical conductivity, metallic luster, and malleability....
All metallic solids exhibit high thermal and electrical conductivity, metallic luster, and malleability....
18.5K
Fermi Level Dynamics
262
The vacuum level denotes the energy threshold required for an electron to escape from a material surface. It is usually positioned above the conduction band of a semiconductor and acts as a benchmark for comparing electron energies within various materials.
Electron affinity in semiconductors refers to the energy gap between the minimum of its conduction band and the vacuum level and it is a critical parameter in determining how easily a semiconductor can accept additional electrons.
The work...
Electron affinity in semiconductors refers to the energy gap between the minimum of its conduction band and the vacuum level and it is a critical parameter in determining how easily a semiconductor can accept additional electrons.
The work...
262
Types of Semiconductors
625
Intrinsic semiconductors are highly pure materials with no impurities. At absolute zero, these semiconductors behave as perfect insulators because all the valence electrons are bound, and the conduction band is empty, disallowing electrical conduction. The Fermi level is a concept used to describe the probability of occupancy of energy levels by electrons at thermal equilibrium. In intrinsic semiconductors, the Fermi level is positioned at the midpoint of the energy gap at absolute zero. When...
625
Bonding in Metals
47.5K
Metallic bonds are formed between two metal atoms. A simplified model to describe metallic bonding has been developed by Paul Drüde called the “Electron Sea Model”.
47.5K
Biasing of Metal-Semiconductor Junctions
265
Biasing metal-semiconductor junctions involves applying a voltage across the junction. Specifically, the metal is connected to a voltage source, while the semiconductor is grounded. This technique is essential for controlling the direction and magnitude of current flow in electronic devices, including diodes, transistors, and photovoltaic cells.
In Schottky junctions, where the semiconductor is n-type, applying a positive voltage to the metal relative to the semiconductor reduces its Fermi...
In Schottky junctions, where the semiconductor is n-type, applying a positive voltage to the metal relative to the semiconductor reduces its Fermi...
265


