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Updated: Jul 13, 2025

Covalent Attachment of Single Molecules for AFM-based Force Spectroscopy
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酸作为原子层沉积抑制剂:来自AFM-IR的光谱洞察力

Saumya Satyarthy1, Md Hasan Ul Iqbal1, Fairoz Abida2

  • 1Department of Chemistry and Biochemistry, The University of Alabama, Tuscaloosa, AL 35487, USA.

Nanomaterials (Basel, Switzerland)
|October 14, 2023
PubMed
概括

酸 (SA) 显示作为一个区域选择性原子层沉积 (AS-ALD) 阻断层的承诺. 这项研究表明,SA单层有效地抑制了Co和Cu上的ZnO ALD生长,这对于先进的芯片制造至关重要.

关键词:
飞行员空中导航机组IRIR原子层沉积的原子层沉积.原子力显微镜的原子力显微镜.炭酸是碳酸中的一种.红外光谱学 红外光谱学抑制剂抑制剂的使用自己组装的单层单层.

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