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热扫描探头石刻技术用于透明基板上的宽带按需等离子纳米结构

Lorenzo Ramò¹, Maria Caterina Giordano², Giulio Ferrando²

¹OptMatLab, Dipartimento di Fisica, Università di Genova, Via Dodecaneso 33, I-16146 Genova, Italy.

ACS applied nano materials

|October 19, 2023

概括

热扫描探针光刻 (t-SPL) 现在可以在透明基板上实现高分辨率的纳米图案. 这一突破扩大了光子设备和先进材料的纳米光刻应用.

科学领域:

纳米技术纳米技术
材料科学材料科学材料科学
光学是什么?光学是什么?光学是什么?

背景情况:

热扫描探针光刻 (t-SPL) 提供高分辨率的纳米图案,但仅限于导电,不透明的基板.
现有的t-SPL方法需要电偏差,限制其使用透明材料.

研究的目的:

开发一种t-SPL方法,用于光学透明基板上的非侵入性纳米光刻.
为了使可见和近红外光谱范围的光子纳米结构的制造.

主要方法:

在介电基板和图案层之间引入了一个超薄的透明导电氧化膜.
使用t-SPL进行光子纳米结构的高分辨率纳米图案.

主要成果:

实现了与传统半导体基板相提并论的纳米光刻性能.
展示了纳米天线阵列的制造和可调的等离子反应.
保持了透明基板的光学特性.

结论:

这种t-SPL方法克服了纳米石墨的先前基板限制.
该技术适用于在脆弱材料上创建混合等离子体超表面.
能够在纳米光子学,传感和热塑学中进行新的应用.

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