连贯里埃散射计:用于检查格子上的孤立颗粒或缺陷的整体工具

Applied optics
|October 19, 2023
PubMed
概括

连贯里埃散射计 (CFS) 可以检测微妙的缺陷,如100纳米粒子,在衍射格子上. 这种技术为可靠的衍射格子检查提供了可行的解决方案.

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