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横向光学奇点诱导阶段纳米结构的精度测量

Xiujie Dou, Jiakang Zhou, Yuquan Zhang

|October 20, 2023

概括

横向光学奇点 (TOSs) 可以精确测量纳米结构的特性. 在照亮纳米结构后分析分散的TOS,可以准确地检索关键的物理参数.

科学领域:

光学和光子学在光学和光子学.
纳米技术纳米技术
计量学计量学是一门学科.

背景情况:

光学奇点是零强度的点,其中相位和极化不确定.
束,就像拉盖尔-高斯模式一样,具有相位奇点.
横向光学奇点 (TOSs) 是对光物质相互作用敏感的纳米尺度现象.

研究的目的:

提出并展示使用TOSs来精确描述纳米结构的方法.
通过一步纳米结构来研究TOSs的散射.
建立一种方法来从分散的TOS中检索纳米结构参数.

主要方法:

通过三波干扰生成TOS.
一个步骤纳米结构的照明与生成的TOSs.
对TOS的远场散射模式的分析.

主要成果:

TOS的散射方向与纳米结构的物理参数相关.
监测分散的TOS的空间坐标可以确定它们的传播方向.
实现了步骤纳米结构参数的高精度检索.

结论:

托斯为纳米结构计量学提供了一种新且高度精确的方法.
拟议的技术利用光物质与奇点的相互作用来进行参数提取.
这种方法为先进的纳米尺度表征开辟了可能性.

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