基于MEMS的高灵敏度复合F-P腔光纤传感器用于海水温度和盐度的测量
Optics express
|October 20, 2023
概括
这项研究引入了一种新的光纤盐度传感器,使用微电机系统 (MEMS) 技术同时测量温度和盐度. 传感器实现了高精度和补偿交叉灵敏度,显示了海洋应用的巨大潜力.
科学领域:
- 光学工程是指光学工程.
- 传感器技术 传感器技术
- 材料科学 材料科学 材料科学
背景情况:
- 准确地在现场测量海洋温度和盐度对于气候监测和海洋研究至关重要.
- 现有的传感器面临着小型化,交叉灵敏度和稳定性的挑战.
研究的目的:
- 开发基于微电子机械系统 (MEMS) 的光纤传感器,用于同时高分辨率测量温度和盐度.
- 设计一个复合的法布里-佩罗 (F-P) 腔结构,以弥补交叉灵敏度的错误.
主要方法:
- 使用来测温和玻璃微结构来测盐度的双腔FP传感器的制造.
- 实施表面水友性处理,以改善小型化腔体中的流体处理.
- 利用光学路径差异 (OPD) 解调来实现准确的信号处理.
主要成果:
- 传感器显示温度灵敏度为110.25nm/°C,盐度灵敏度为178.75nm/‰,在540°C和540‰范围内.
- 达到高分辨率,温度为5.02 × 10−3°C,盐度为0.0138‰.
- 通过使用腔的特性,成功地弥补了盐度-温度交叉敏感性.
结论:
- 提出的基于MEMS的光纤传感器为同时监测温度和盐度提供了强大的解决方案.
- 它的大规模生产,高稳定性和小尺寸的优点使其非常适合各种海洋应用.
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