单个热扫描数字系统用于深层瞬态光谱学
D Sreeshma1, K S R Koteswara Rao1
1Department of Physics, Indian Institute of Science, Bangalore, Karnataka 560012, India.
The Review of scientific instruments
|October 20, 2023
概括
一个新的基于微控制器的深层次暂时光谱 (DLTS) 系统,利用Arduino-Due,有效地识别半导体缺陷. 这种具有成本效益和准确的系统简化了缺陷分析,提供了多功能应用.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 半导体的深层次缺陷对设备性能产生重大影响.
- 传统的深层瞬态光谱 (DLTS) 系统可能是复杂而昂贵的.
- 准确地描述这些缺陷对于半导体开发至关重要.
研究的目的:
- 开发一种基于微控制器的新,具有成本效益和用户友好的深度层次暂时光谱 (DLTS) 系统.
- 实施先进的信号处理算法用于缺陷识别.
- 用精确的半导体样本验证系统的性能.
主要方法:
- 开发一个集成Arduino-Due,电容计和接口电路的DLTS系统.
- 实现定制算法用于数字控制充电脉冲生成,数据采集和信号处理.
- 制造和测试黄金合p-n连接样本,以验证系统的准确性.
主要成果:
- 基于微控制器的DLTS系统成功地发现了中的深层缺陷.
- 计算的缺陷参数 (能量,捕获截面,度) 与文献值有很好的一致性.
- 该系统展示了50 ns的最小脉冲宽度和高数据采集分辨率.
结论:
- 开发的基于微控制器的DLTS系统为半导体缺陷分析提供了简单,廉价和准确的解决方案.
- 系统的数字控制和高效处理将错误和实验时间降到最低.
- 该系统的多功能性得到了成功应用于金化的证实.
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