基于沃罗诺伊的原子计数使用交叉声调整方案平均了STEM强度.
Florian F Krause1, Andreas Rosenauer2
1Institut für Festkörperphysik, Universität Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany.
Ultramicroscopy
|October 23, 2023
概括
本研究介绍了一种新的代数方法,用于使用扫描传输电子显微镜 (STEM) 纠正原子计数中的信号交叉声. 该技术显著提高了原子尺度厚度测定的测量精度.
科学领域:
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
- 纳米技术 纳米技术
背景情况:
- 定量扫描传输电子显微镜 (STEM) 对于精确的原子分辨率厚度测量至关重要,通常称为"原子计数".
- 在STEM中信号强度受到邻近的原子列 (交叉柱) 的影响,特别是在较厚的样本中,降低了测量精度.
- 对所有邻方配置的计算在计算上具有挑战性,阻碍了精确的原子计数.
研究的目的:
- 开发一种在STEM原子计数中以后减少交叉通话的方法.
- 在原子尺度分析中提高厚度测量的准确性和精度.
- 为纠正交叉通话效应提供一个计算高效的方法.
主要方法:
- 开发了一个参数模型来描述STEM成像中的交叉声效应.
- 交叉对应被一个可逆矩阵表示,允许代数校正.
- 该方法使用多切片模拟进行了验证,并应用于晶金和黄金纳米粒子.
主要成果:
- 提出的代数方法有效地减少了交叉通话,计算成本最小.
- 经过交叉校正的强度值可以直接与参考数据进行比较,以提高准确性.
- 模拟研究表明,测量精度有了显著而强大的改善.
结论:
- 开发的方法为STEM中精确的原子计数提供了一个强大的工具.
- 它通过有效地纠正交叉通话效应,克服了以前方法的局限性.
- 这种技术有望在材料科学中推进原子分辨率厚度测量.
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