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Updated: Jul 12, 2025

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
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基于铁电的哈夫尼亚M3D FeTFT在极低温度下化,以及用于内存计算应用的TCAM电池

Hongrae Joh1, Sooji Nam2, Minhyun Jung1

  • 1The School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea.

ACS applied materials & interfaces
|October 24, 2023
PubMed
概括

聚焦微波回火使得单立体3D叠加铁电薄膜晶体管 (FeTFT) 的低温制造成为可能,用于高密度内存计算 (CIM) 应用. 这克服了3D集成中的热问题,为节能AI硬件铺平了道路.

关键词:
聚焦的微波火火.哈夫尼亚铁电薄膜晶体管是一种铁电晶体管.低温回火的回火方式一个单一的三维整合.三元内容可定位的存储器

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