使用时间到数字转换器和电容量校准电路测试数组级小面积基铁电容器的关键参数的方法
Donglin Zhang1,2, Honghu Yang3, Yue Cao4
1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.
Micromachines
|October 28, 2023
概括
这项研究引入了一种用于测试基于的铁电容器的新型电路,克服了传统方法的局限性. 这种新方法可以精确测量关键的铁电参数,以改进内存设备的开发.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体设备物理 半导体设备物理
背景情况:
- 基于的铁电记忆提供了增强的集成电路性能,但面临耐久性和保留挑战.
- 准确,持续测试铁电容的参数对于解决这些问题至关重要.
- 铁电电容器的传统测量方法在时间,精度和寄生电容处理方面是有限的,特别是对于小面积的设备.
研究的目的:
- 分析铁电电容器的工作原理.
- 设计一种新的方法和电路,用于检测残余极化,和极化和印记偏移.
- 为了使铁电电容器的高精度测试,特别是小面积的电容器.
主要方法:
- 对铁电电容器工作原理的分析.
- 测试电路的设计包括一个翻转读出电路,电容校准电路和VTC&TDC读出电路.
- 拟议电路的模拟,以评估其性能.
主要成果:
- 拟议的电路克服了传统方法的局限性,使高精度的铁电电容器测试成为可能.
- 电容校准电路实现了84%的电容偏差降低.
- 读出电路的精度为5.91位,读出时间为150ns,耗电量为1mW.
结论:
- 开发的电路可以以低成本获取数组级小面积铁电容量数据.
- 这种测试方法可以指导随后的设备优化和基于的铁电记忆的电路设计.
- 这些发现有助于推进高性能铁电随机存储器 (FeRAM) 的开发.
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