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Updated: Jun 16, 2026

An Analog Macroscopic Technique for Studying Molecular Hydrodynamic Processes in Dense Gases and Liquids
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Published on: December 4, 2017

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测量和模拟超低能离子-固体相互作用动力学

Michael Titze1, Jonathan D Poplawsky2, Silvan Kretschmer3

  • 1Ion Beam Laboratory, Sandia National Laboratories, Albuquerque, NM 87185, USA.

Micromachines
|October 28, 2023
PubMed
概括

在1 keV的焦离子束中将黄金植入中,可以实现精确的0.8 nm深度. 这一突破为先进的半导体和量子技术提供了较低的植入能,具有高空间分辨率.

关键词:
聚焦的离子束.离子植入植入的离子植入.超低能量的超低能量的能量.

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