优化移除函数的形态,用于旋转磨料喷水抛光
Guipeng Tie1,2,3,4, Zhiqiang Zhang1,2,3, Bo Wang1,2,3
1College of Intelligence Science and Technology, National University of Defense Technology, 109 Deya Road, Changsha 410073, China.
Micromachines
|October 28, 2023
概括
旋转的磨砂喷水抛光优化了复杂光学元件制造的移除功能. 这种技术实现了稳定的高斯形式,提高了表面错误校正和高端光学产品的生产效率.
科学领域:
- 制造业 工程 制造工程
- 光学工程是指光学工程.
- 材料科学 材料科学 材料科学
背景情况:
- 磨砂式喷水抛光为复杂的光学元件提供无接触加工优势.
- 现有的方法缺乏对称的去除功能,限制了表面图形错误的纠正.
- 光腔的高精度制造需要先进的抛光技术.
研究的目的:
- 为了优化磨砂喷水抛光的去除功能,以改善表面校正.
- 开发一种具有稳定的高斯移除配置的旋转磨砂喷水抛光方法.
- 为光学元件制造过程中的工艺参数选择提供理论和实验支持.
主要方法:
- 旋转磨砂剂喷水抛光的实施方法.
- 导出一个与去除函数峰值距离与喷嘴倾斜角度相关的经验公式.
- 分析材料去除效率,喷嘴倾斜角度和对峙距离.
- 在各种过程参数下实验验证经验公式.
主要成果:
- 使用旋转磨砂喷水抛光实现了稳定的高斯形状去除功能.
- 一个经验式的公式是衍生和实验验证的过程参数选择.
- 确定了优化的工艺条件,以实现稳定的高斯去除和高效的抛光.
- 证明了高端光学元件的更好的校正能力和制造效率.
结论:
- 旋转的磨砂喷水抛光有效地创建了一个稳定的高斯消除功能,适合CCOS抛光.
- 衍生出来的经验公式有助于选择最佳的工艺参数,以提高成型能力.
- 这项技术显著改善了复杂,高精度光学元件的制造.
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