级联式2D微镜与应用到LiDAR
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Behrad Ghazinouri1, Siyuan He1
1Mechatronics and MEMS Research Laboratory, Toronto Metropolitan University, Toronto, ON M5B 2K3, Canada.
Micromachines
|October 28, 2023
概括
一种新的级联扭矩束设计显著提高了电磁微镜的垂直扫描角度. 这种强大的设计提高了3D LiDAR系统等应用的性能.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 光学工程是指光学工程.
- 机器人技术 机器人技术 机器人技术
背景情况:
- 传统的二维电磁微镜在垂直扫描角度和强度方面存在局限性.
- 优化旋转角度和共振频率之间的权衡对于提高性能至关重要.
- 现有的设计往往难以平衡扫描范围与结构完整性.
研究的目的:
- 引入和验证用于大孔2D电磁微镜的新型级联扭矩束设计.
- 为了增加垂直扫描角度而不会损害设备的强度.
- 通过理论分析,模拟和实验验证来证明设计的有效性.
主要方法:
- 理论分析和有限元模拟以确定最佳的刚度比率并预测性能改进.
- 使用灵活的印刷电路板和CNC加工的Ti合金薄膜制造原型级联和非级联微镜.
- 在相似的共振频率下对级联与非级联设计进行比较性性能评估.
主要成果:
- 与传统设计相比,级联设计实现了高达26%的垂直扫描角度.
- 理论和模拟结果通过制造的原型的实验数据来验证.
- 增强的微镜成功地集成和建模在3D LiDAR系统中.
结论:
- 级联扭矩束设计为二维电磁微镜技术提供了显著的进步.
- 这一创新为扫描应用程序的性能和稳定性提供了改善的途径.
- 成功地集成到3D LiDAR系统中,突出了开发的微镜的实际实用性.
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