热压变形产生细粒度,高度密度和 (002) 纹理的Ru目标
Shaohong Liu1,2, Fengshuo Xu1, Limin Zhou2
1Key Laboratory for Anisotropy and Texture of Materials (Ministry of Education), School of Materials Science and Engineering, Northeastern University, Shenyang 110819, China.
Materials (Basel, Switzerland)
|October 28, 2023
概括
这项研究引入了一种新的热压变形方法,以创建高密度,细粒度的 (Ru) 喷目标. 这种技术提高了半导体应用的机械和晶体学性能.
科学领域:
- 材料科学 材料科学 材料科学
- 金工业是金工业的一个方面.
- 半导体制造业 半导体制造业
背景情况:
- (Ru) 是一种重要的耐火金属,用于半导体制造,作为喷射目标材料.
- 传统的粉末金努力生产密集,细粒度的Ru目标,具有所需的结晶学方向.
研究的目的:
- 开发一种新的制造方法,以改善密度,颗粒大小和纹理的鲁目标.
- 研究热压变形对的微观结构和结晶学特性的影响.
主要方法:
- 使用在1400°C的热压变形制造目标的制造,压力范围为30-40MPa.
- 目标密度,粒度大小,硬度和晶体结构的表征 (特别是 (002) 和 (101) 峰值强度).
主要成果:
- 在制造的目标中实现了高相对密度 (98.8%) 和小颗粒大小 (~4.4μm).
- 证明圆柱形样本成功转化为圆盘形目标,在中部地区几乎完全密集.
- 观察到目标硬度和 (002) / 101) 峰值强度比率随着压力增加而增加,表明增强性质.
结论:
- 热压变形是一种有效的方法,用于制造具有强烈 (002) 纹理的密集,细粒度的喷目标.
- 在热压过程中施加的压力直接影响了目标的密集,粒度提炼和结晶学方向.
- 这种方法为先进的半导体应用提供了一条改善鲁目标性能的途径.
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