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半桥张力计与弧形压电阻器
Ji-Hoon Han1, Sung Joon Min2, Eun-Sang Lee1
1KIURI Center for Hydrogen Based Next Generation Mechanical System, Inha University, Incheon 21999, Republic of Korea.
一种新的半桥张力计设计提高了高压传感器的灵敏度. 这种新设计采用上玻璃技术,为压力传感应用提供了更好的信号强度和更简单的温度补偿.
科学领域:
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
- 机械工程 机械工程
背景情况:
- 半桥张力计对于隔膜类型的高压传感器至关重要.
- 安装限制可以限制传统张力计的输出灵敏度.
研究的目的:
- 开发一种具有增强灵敏度的新型半桥张力计.
- 为了解决高压传感应用中现有的张力计的局限性.
主要方法:
- 使用上玻璃 (SiOG) 基板技术进行制造.
- 设计了一个半桥配置,用于触角应变的弧度计和用于辐射应变的线性计.
- 连接两个半桥,形成一个完整的桥梁配置.
主要成果:
- 达到压力传感器的典型灵敏度大约为16mV/V/bar.
- 在0至50bar的压力范围和五种温度中证明了线性输出.
- 观察到最小的零转移 (0.05%FS) 和跨度转移 (0.03%FS).
- 与传统传感器相比,报告了更高的信号噪声比率.
结论:
- 新的弧形接触式张力计设计显著增加了输出灵敏度.
- 开发的压力传感器表现出极好的线性和温度稳定性.
- 该设计为实际应用提供了更简单的温度补偿算法.
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