高功率效率的读出电路,使用微电机系统电容加速器的平均电容电压转换器
Linxi Li1,2, Xinquan Lai1, Yuheng Wang3
1School of Electronic Engineering, Xidian University, Xi'an 710071, China.
Sensors (Basel, Switzerland)
|October 28, 2023
概括
本研究介绍了微电机系统 (MEMS) 加速度计的平均电容电压转换器 (CVC). 新的CVC技术显著降低了读出电路的功耗,而不会影响性能.
科学领域:
- 电气工程 电气工程
- 传感器技术 传感器技术
- 微电子学微电子学
背景情况:
- 传统的微电机系统 (MEMS) 加速度计读取回路面临由于高采样频率要求的功耗挑战.
- 在MEMS传感器中的寄生电容需要在电容到电压转换器 (CVC) 和模拟到数字转换器 (ADC) 中的高采样率,从而增加功耗.
- 在传统的基于CVC的系统中,噪声的转化和恶化是重要的问题.
研究的目的:
- 提出和评估一个平均电容电压转换器 (CVC) 技术,以提高MEMS加速仪读出电路的功率效率.
- 为了减轻MEMS传感器系统中对模拟数字转换器 (ADC) 的高采样频率需求.
- 为了减少整体功耗而不会牺牲噪音性能.
主要方法:
- 开发一种平均电容电压转换器 (CVC) 技术.
- 使用0.18微米BCD工艺模拟传统和拟议的读出电路.
- 在0.18微米BCD工艺中制造和测试拟议的CVC电路.
主要成果:
- 拟议的平均CVC技术消除了传统电路中存在的噪声转移问题.
- 通过拟议的读出电路,实现了53%的功耗降低.
- 模拟显示,当ADC采样频率降低时,传统电路的噪声功率光谱密度 (PSD) 增加了12dB,这在拟议的设计中缺少.
- 实验结果证实了平均CVC技术的性能优于传统的CVC.
结论:
- 平均CVC技术为MEMS加速度计读出电路的功率效率提供了显著的改善.
- 这种方法有效地解决了噪声转移问题,并降低了功耗,而不会降低性能.
- 拟议的CVC方法是开发更节能MEMS传感器系统的可行解决方案.
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