高隔离,双,磁电微电子机械共振器磁力计
Thomas Mion1, Michael J D'Agati2, Sydney Sofronici2
1US Naval Research Laboratory, American Society for Engineering Education Postdoc, Washington, DC 02375, USA.
Sensors (Basel, Switzerland)
|October 28, 2023
概括
新的磁电 (ME) 传感器为磁场检测提供超低功率和高灵敏度. 优化的共振束设计提高了连续监控应用的抗振性能和性能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 物理 物理学 物理
背景情况:
- 基于磁电 (ME) 的磁力计因其超低功耗,小尺寸和皮科特斯拉级检测极限而引起了人们的注意.
- 这些传感器非常适合对近直流和低频交流磁场进行连续监测,因为它们具有敏感的电读输出.
- 现有的ME磁传感器通常依赖于异构结构设备中的微电子机械系统 (MEMS) 的共振特征.
研究的目的:
- 为ME磁传感器设计和制造一个优化的固定-固定共振束结构.
- 与以前的ME-MEMS悬臂设计相比,提高振动易感性和功率效率.
- 探索使用新的强磁薄膜来提高传感器性能.
主要方法:
- 使用压电化 (AlN) 和一种新型 (Fe0.5Co0.5) 0.92Hf0.08磁强合金) 制造一个固定的共振束结构.
- 优化共振装置配置,以实现高隔离和低功率运行 (约800nW).
- 使用电场驱动和读出磁场灵敏度和检测极限的表征.
主要成果:
- 新的双式ME MEMS共振器设计显示出高隔离性和降低对振动的易感性.
- 使用 (Fe0.5Co0.5) 0.92Hf0.08合金提供了低应力,无形,高磁性材料,具有超低的磁晶异性.
- 在压缩状态下释放时,优化的传感器设计实现了125 Hz/mT的磁场灵敏度.
结论:
- 开发的固定振束ME MEMS传感器提供了更好的性能和抗振性能.
- 新型强磁合金和优化的设计为下一代高度敏感的磁场传感器铺平了道路.
- 根据实验结果,讨论了未来ME MEMS场传感器的进一步设计参数.
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