有机酸盐自组装单层的热稳定性和直角功能化,作为Cu互连的潜在线路
Yu-Wei Chou1, Shou-Yi Chang1, Pei Yuin Keng1
1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
ACS omega
|October 30, 2023
概括
在上研究了酸 (BPA) 和aminopropyltriethoxysilane (APTES) 自组装单层 (SAM) 的热稳定性. 与APTES SAM相比,BPA SAM具有更高的热稳定性,使其适合修改铜互连.
科学领域:
- 材料科学 材料科学 材料科学
- 表面化学 表面化学
- 纳米技术 纳米技术
背景情况:
- 自组装单层 (SAM) 对于表面修改至关重要.
- 了解SAM的热稳定性对于微电子应用至关重要.
- 有机酸盐和有机酸盐SAM通常用于表面功能化.
研究的目的:
- 在基底上比较丁酸 (BPA) 和aminopropyltriethoxysilane (APTES) 的热稳定性.
- 评估这些SAM适用于修改铜互连线中的介电侧墙的适用性.
- 展示一种方法来克服有机酸盐SAM的基质反应性问题.
主要方法:
- 在Si基板上制造BPA和APTES SAMs.
- 从50到550°C的SAM的热处理.
- 使用X射线光电子光谱学 (XPS) 分析SAM热溶解和裂变.
主要成果:
- APTES SAMs显示在250°C开始热溶解,在400°C完全分解.
- BPA SAMs表现出更高的热稳定性,在350°C开始脱落,在500°C左右完全脱落.
- 有机酸盐SAM表现出比有机酸盐SAM更大的热稳定性,用于修改介电侧墙.
结论:
- 丁酸SAM提供了比aminopropyltriethoxysilaneSAM更好的热稳定性.
- 有机酸盐SAM更适合用于高温应用,例如铜互连修改.
- 可以使用牺牲性硫酸盐SAM层来管理金属基板上的有机酸盐薄膜的反应性.
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