Fernando E Camino1, Nikhil Tiwale1, Sooyeon Hwang1

  • 1Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States of America.

Nanotechnology
|November 2, 2023
PubMed
概括

偏差校正电子束光刻 (AC-EBL) 在厚基板上实现纳米分辨率. 膜的近距离效应限制了特征大小,但基板厚度对量子设备制造的图案质量影响最小.