Cl-Si:

Peizhi Wang1, Fengzhou Fang1,2

  • 1Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin D4, Ireland.

概括

点缺陷通过降低吸附能量和激光值,显著提高了激光诱导的原子层蚀刻 (ALE). 这种缺陷介导的机制使得高效,无损的Cl-Si的层次蚀刻成为可能.