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Updated: Jul 11, 2025

The Synthesis of [Sn10SiSiMe334]2- Using a Metastable SnI Halide Solution Synthesized via a Co-condensation Technique
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The Synthesis of [Sn10SiSiMe334]2- Using a Metastable SnI Halide Solution Synthesized via a Co-condensation Technique

Published on: November 28, 2016

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的蒸汽阶段化,以为终点,使用N-素-糖化物

Patrick R Raffaelle1, George T Wang2, Alexander A Shestopalov1

  • 1Department of Chemical Engineering, Hajim School of Engineering and Applied Sciences, University of Rochester, Rochester, New York 14627, United States.

ACS applied materials & interfaces
|November 15, 2023
PubMed
概括

使用苏胺试剂蒸汽相化表面有效地为原子层沉积 (ALD) 创建了一个高级阻断层. 这种干化学方法为开发先进的ALD耐药性提供了一个有前途的替代方案.

关键词:
区域选择性的原子层沉积沉积.原子阻力可以抵抗原子.的化化.表面功能化的功能化.蒸汽阶段沉积的蒸汽阶段沉积.

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