来自二维MoTe2的高性能互补电路
Jun Cai1,2, Zheng Sun1,2, Peng Wu3,4
1Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States.
这项研究表明,原始的二甲 (MoTe2) 场效应晶体管 (FET) 是n型. 一种新的氧化兴奋剂方法使p型MoTe2 FETs成为可能,为基于二维材料的互补电路铺平了道路.
科学领域:
- 材料科学 材料科学 材料科学
- 凝聚物质物理学 凝聚物质物理学
- 纳米技术纳米技术
背景情况:
- 二维 (2D) 材料对下一代电子产品充满希望.
- 对补充性金属氧化物半导体 (CMOS) 电路来说,调整 Schottky 屏障至关重要.
- 从单一的二维材料开发互补电路仍然具有挑战性.
研究的目的:
- 研究二甲 (MoTe2) 场效应晶体管 (FET) 的内在电气特性.
- 从MoTe2开发一种用于互补电路的n型和p型FET的方法.
- 为了证明基于MoTe2的互补逻辑电路的可行性.
主要方法:
- 制造MoTe2场效应晶体管 (FET) 以最小的空气暴露.
- 鉴定原始MoTe2FETs的特征,以确定它们的内在极性.
- 应用一种氧化 (NO) 兴奋剂策略,将MoTe2 FET从n型调整为p型.
- 使用MoTe2 n-FET和p-FET的补充逆变器电路的制造和测试.
主要成果:
- 纯MoTe2 FET表现出n型行为,无论金属接触,电子电流高达275μA/μm.
- 氧化的兴奋剂成功地将MoTe2 FET转化为单极p型.
- 添加 p-FET 实现 170 μA/μm 的孔电流,具有高开/关比 (10^5).
- 使用MoTe2.2进行了功能补充逆变器电路的演示.
结论:
- MoTe2可以有效地用于n型和p型晶体管.
- 氧化兴奋剂为控制MoTe2 FET极性提供了一种可行的策略.
- MoTe2是用于先进的CMOS技术和未来电子系统的有前途的2D材料.
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