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环境温度对堆叠纳米板晶体管的电热特性的影响 堆叠纳米板晶体管具有多个侧面堆
Peng Zhao1,2,3, Lei Cao1,2,3, Guilei Wang4
1Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
Nanomaterials (Basel, Switzerland)
|November 24, 2023
概括
自热效应 (SHE) 在堆叠的纳米板晶体管中随着环境温度的增加而恶化. 较高的堆数量会放大热交叉声,影响设备性能,特别是在室温以上的p型晶体管中.
科学领域:
- 半导体设备物理学 半导体设备物理
- 纳米技术 纳米技术
- 热管理是一种热管理.
背景情况:
- 纳米尺度的设备面临着由于局限的几何形状而加剧的自我加热效应 (SHE).
- 堆叠的纳米板晶体管具有独特的热挑战,堆数量不断增加 (N_stack).
研究的目的:
- 研究环境温度 (T_amb) 在堆叠的纳米板晶体管中对SHE的影响.
- 分析n型和p型设备的热交叉和性能降低趋势.
- 考虑电路应用,为堆叠的纳米板晶体管提供设计指南.
主要方法:
- 分析每电流和值电压的温度系数.
- 在不同 T_amb. 处研究取决于门长度的电热特性.
- 利用温度依赖的反散模型来解释排水电流的变化.
主要成果:
- 增加的N_stack会导致更严重的热交叉声和n型和p型晶体管的明显性能降低.
- 零温度系数偏差点 (V_ZTC) 由于增强的热交叉声,在室温以上的T_amb的p型设备中显著下降.
- 模拟结果证实了T_amb在堆叠的纳米板晶体管中对SHE的显著影响.
结论:
- 在堆叠的纳米板晶体管中,环境温度极大地影响了自我加热效应.
- 热交叉是影响设备性能的一个关键因素,特别是在多堆的配置中.
- 该研究为设计集成电路中可靠的堆叠纳米板晶体管提供了宝贵的见解.
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