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Updated: Jul 10, 2025

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Fabrication and Characterization of Superconducting Resonators
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在同质BAW共振器上进行侧面共振的准3D模型
Carlos Udaondo1, Carlos Collado1, Jordi Mateu1
1Signal Theory and Communications (TSC) Department, Universitat Politècnica de Catalunya (UPC), 08034 Barcelona, Spain.
Micromachines
|November 25, 2023
概括
一种新的计算方法模拟了批量声波 (BAW) 共振器中的侧面共振,改善了过器的响应. 这种快速传输线矩阵 (TLM) 方法准确地预测了共振器输入阻抗,性能优于传统模拟.
科学领域:
- 电气工程 电气工程
- 声学物理 声学物理
背景情况:
- 大批声波 (BAW) 共振器中的侧向模式会导致带内虚假共振,降低过器的性能.
- 精确建模这些侧面共振对于优化BAW共振器设计和波器响应至关重要.
研究的目的:
- 开发一种快速而准确的计算方法,用于在BAW共振器中建模侧面共振.
- 通过考虑电极场分布和压电合,能够精确预测振荡器输入阻抗.
主要方法:
- 采用传输线矩阵 (TLM) 方法,使用预先计算的Lamb波分散曲线和TE1模式的等效特征阻抗.
- 实现了输电线和节点Y矩阵的网络,通过压电构成关系将粒子位移配置文件与电域结合起来.
主要成果:
- 拟议的TLM模型准确地预测了BAW共振器的输入阻抗.
- 该模型与薄膜批量声学共振器 (FBAR) 和固体安装共振器 (SMR) 的有限元素方法 (FEM) 模拟以及对SMR的实验测量有很强的一致性.
- 这种TLM方法的计算速度大约是传统FEM的200倍.
结论:
- 开发的基于TLM的模型为分析BAW共振器的侧面共振提供了更快,更准确的替代方案.
- 该方法为共振器特性提供了宝贵的见解,有助于设计具有增强带内响应的改进射频过器.
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