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Updated: Jul 10, 2025

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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激光切割质量的探索性研究通过横截面切割配置文件

Ruqi Chen1, Shing Chang1, Shuting Lei1

  • 1Department of Industrial and Manufacturing Systems Engineering, Kansas State University, Manhattan, KS 66506, USA.

Micromachines
|November 25, 2023
PubMed
概括

这项研究引入了一种新的方法,用于使用3D光学分析和立方线模型来评估激光切割质量. 该方法提高了激光切割过程的准确性和一致性评估.

关键词:
在上的薄膜.激光刻 激光刻 激光刻 激光刻平均平方误差 (MSE)目标面积比率 (RA)

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