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Seokwon Joo1, Jung Yeon Han2, Soonmin Seo2

  • 1Department of Chemical Engineering and Department of Energy Systems Research, Ajou University, Suwon 16499, Republic of Korea.

Micromachines
|November 25, 2023
PubMed
概括

高性能传感器对于下一代技术至关重要. 本文审查了电容传感器的模式技术,并介绍了3D结构,以提高传感器的性能和集成.