高温故障演变分析K型薄膜热电偶的分析
Yong Ruan1, Jiaheng Li2, Qian Xiao2
1Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
Micromachines
|November 25, 2023
概括
基于的薄膜热电偶 (TFTC) 由于材料降解而在500°C以上显示性能下降. 这项研究研究了Ni-Cr和Ni-SiTFTC在高温下失效的机制.
科学领域:
- 材料科学 材料科学 材料科学
- 热电设备 热电设备
- 薄膜技术 薄膜技术
背景情况:
- 薄膜热电偶 (TFTC) 在各种应用中对于温度传感至关重要.
- 了解TFTC的高温性能限制和故障机制对于可靠运行至关重要.
- 基于的合金通常用于热电应用,因为它们具有有利的特性.
研究的目的:
- 为了制造和表征Ni90%Cr10%和Ni97%Si3%的TFTC.
- 在高温下研究这些TFTC的热电性能和故障机制.
- 分析温度化对Ni-Cr和Ni-Si薄膜电阻和表面微观结构的影响.
主要方法:
- 使用磁铁喷射制造Ni-Cr和Ni-SiTFTC的制造.
- 在分阶段升温过程中,静态校准和持续监测热电输出.
- 从室温到500°C的重复静态校准试验.
- 在回火处理后测量薄膜电阻.
- 使用扫描电子显微镜 (SEM) 和X射线光电谱 (XPS) 进行表面表征.
主要成果:
- 对于TFTCs,获得了2300μV/°C的Seebeck系数.
- 在600°C时观察到设备故障,热电潜力的迅速下降表明了这一点.
- 热电性能在重复测试至500°C时恶化.
- 在后的Ni-Cr和Ni-Si薄膜中观察到电阻变化和微观结构变化.
结论:
- 在高温下,Ni-Cr和Ni-SiTFTC表现出性能降低和故障,这可能是由于化学和微观结构的变化.
- 该研究提供了对这些特定TFTC在高温应用中的局限性的见解.
- 需要进一步的研究来提高薄膜热电偶的热稳定性和可靠性.
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